A Slope-Adapted Sample-Tilting Method for Profile Measurement of Microstructures with Steep Surfaces
Joint Authors
Fang, Hui
Xu, Bin
Chen, Wei
Tang, Hairong
Zhao, Shiping
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-08-13
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
This paper presents a slope-adapted sample-tilting method for the profile measurement of microstructures with steep surfaces.
Distinct from the traditional scanning method that has the restriction of a maximum detectable angle, this method corrects the sample-stylus relative angle during the measurement of the steep surface to eliminate the profile deviation and the scanning blind region.
The performance of the proposed method was verified by simulations that measured the surface profiles of a trapezoidal microstructure and a spherical microstructure, finding maximum errors of 0.15 μm and 1.71 μm, respectively, compared to 3.63 μm and 7.85 μm using the traditional scanning method.
The proposed method enables accurate profile measurement and quality control of microstructures with steep surfaces.
American Psychological Association (APA)
Fang, Hui& Xu, Bin& Chen, Wei& Tang, Hairong& Zhao, Shiping. 2015. A Slope-Adapted Sample-Tilting Method for Profile Measurement of Microstructures with Steep Surfaces. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1068857
Modern Language Association (MLA)
Fang, Hui…[et al.]. A Slope-Adapted Sample-Tilting Method for Profile Measurement of Microstructures with Steep Surfaces. Journal of Nanomaterials No. 2015 (2015), pp.1-8.
https://search.emarefa.net/detail/BIM-1068857
American Medical Association (AMA)
Fang, Hui& Xu, Bin& Chen, Wei& Tang, Hairong& Zhao, Shiping. A Slope-Adapted Sample-Tilting Method for Profile Measurement of Microstructures with Steep Surfaces. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1068857
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1068857