Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator
Joint Authors
Zhang, Tao
Liang, Fujun
Li, Min
Li, Shaorong
Pang, Huafeng
Wang, Sufang
Zhu, Huaze
Yan, Zhengxin
Zhao, Shenggui
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-10-25
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
The resonance frequency, fs, and the effective electromechanical coupling factor, keff2, of thin film bulk acoustic resonators (FBARs) are derived by transfer matrix method.
The effects of thickness and density of electrode on fs and keff2 with different piezoelectric layers are investigated by numerical calculation method.
The results show that thickness and density of electrode affect fs obviously, especially in large thickness and density area.
Moreover, the effects of thickness, density, and acoustic velocity of electrode on keff2 of FBAR were also studied.
The results show that there is a maximum keff2 corresponding to the composition of thickness and density of electrode which is about 20% over the original electromechanical factor of piezoelectric film.
keff2 is in the direct proportion to the density ρe and ve of electrode, respectively.
The electrode thickness affects keff2 small with high ve; moreover, when ve is high enough, then keff2 has almost nothing to do with de.
keff2 always rises with electrode thickness first and then descends with its rising, and the thickness corresponding to the maximum keff2 is different with different electrode, but it always locates in the special area.
All above results indicate that the thickness, density, and acoustic velocity of electrode are so important that these results can be applied to design FBAR.
American Psychological Association (APA)
Zhang, Tao& Liang, Fujun& Li, Min& Li, Shaorong& Pang, Huafeng& Wang, Sufang…[et al.]. 2015. Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1069002
Modern Language Association (MLA)
Zhang, Tao…[et al.]. Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator. Journal of Nanomaterials No. 2015 (2015), pp.1-8.
https://search.emarefa.net/detail/BIM-1069002
American Medical Association (AMA)
Zhang, Tao& Liang, Fujun& Li, Min& Li, Shaorong& Pang, Huafeng& Wang, Sufang…[et al.]. Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1069002
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1069002