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Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity
Joint Authors
Rosales-Quintero, Pedro
Calleja, Cesar
Torres, Alfonso
Moreno, Mario
Source
Issue
Vol. 2016, Issue 2016 (31 Dec. 2016), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2016-02-17
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
We have optimized the deposition conditions of amorphous silicon-germanium films with embedded nanocrystals in a plasma enhanced chemical vapor deposition (PECVD) reactor, working at a standard frequency of 13.56 MHz.
The objective was to produce films with very large Temperature Coefficient of Resistance (TCR), which is a signature of the sensitivity in thermal detectors (microbolometers).
Morphological, electrical, and optical characterization were performed in the films, and we found optimal conditions for obtaining films with very high values of thermal coefficient of resistance (TCR = 7.9% K−1).
Our results show that amorphous silicon-germanium films with embedded nanocrystals can be used as thermosensitive films in high performance infrared focal plane arrays (IRFPAs) used in commercial thermal cameras.
American Psychological Association (APA)
Calleja, Cesar& Torres, Alfonso& Rosales-Quintero, Pedro& Moreno, Mario. 2016. Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity. Journal of Nanotechnology،Vol. 2016, no. 2016, pp.1-9.
https://search.emarefa.net/detail/BIM-1109669
Modern Language Association (MLA)
Calleja, Cesar…[et al.]. Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity. Journal of Nanotechnology No. 2016 (2016), pp.1-9.
https://search.emarefa.net/detail/BIM-1109669
American Medical Association (AMA)
Calleja, Cesar& Torres, Alfonso& Rosales-Quintero, Pedro& Moreno, Mario. Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity. Journal of Nanotechnology. 2016. Vol. 2016, no. 2016, pp.1-9.
https://search.emarefa.net/detail/BIM-1109669
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1109669