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Effect of Oxygen Flow Rate on the Optical, Electrical, and Mechanical Properties of DC Sputtering ITO Thin Films
Joint Authors
Tien, C.-L.
Lin, Hong-Yi
Chang, Chih-Kai
Tang, Chien-Jen
Source
Advances in Condensed Matter Physics
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-02-07
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
This study presents the effect of oxygen flow rate on the optical, electrical, and mechanical properties of indium tin oxide (ITO) thin films prepared by the DC magnetron sputtering technique.
The oxygen flow rate was varied from 10 to 50 sccm.
The ITO thin films deposition under different oxygen flow rates exhibits different properties.
We used an optical spectrometer to measure the optical transmittance and a four-point probe instrument to determine the resistivity.
A home-made Twyman-Green interferometer was used to evaluate residual stress and a microscopic interferometer was used to measure the surface roughness of ITO thin films.
The experimental results show that the average optical transmittance is larger than 85% in visible range; the electrical resistivity has a minimum 6.85×10-4 ohm-cm for the oxygen flow of 10 sccm.
The residual stress is varied from −0.15 GPa to −0.34 GPa in the range of 10–50 sccm.
The root-mean-square (rms) surface roughness is changed from 2.64 nm to 2.74 nm as the oxygen flow rate increases.
The results show that the oxygen flow rate has significant influence on the electrical resistivity, residual stress, and surface roughness of the ITO thin film.
American Psychological Association (APA)
Tien, C.-L.& Lin, Hong-Yi& Chang, Chih-Kai& Tang, Chien-Jen. 2018. Effect of Oxygen Flow Rate on the Optical, Electrical, and Mechanical Properties of DC Sputtering ITO Thin Films. Advances in Condensed Matter Physics،Vol. 2018, no. 2018, pp.1-6.
https://search.emarefa.net/detail/BIM-1117169
Modern Language Association (MLA)
Tien, C.-L.…[et al.]. Effect of Oxygen Flow Rate on the Optical, Electrical, and Mechanical Properties of DC Sputtering ITO Thin Films. Advances in Condensed Matter Physics No. 2018 (2018), pp.1-6.
https://search.emarefa.net/detail/BIM-1117169
American Medical Association (AMA)
Tien, C.-L.& Lin, Hong-Yi& Chang, Chih-Kai& Tang, Chien-Jen. Effect of Oxygen Flow Rate on the Optical, Electrical, and Mechanical Properties of DC Sputtering ITO Thin Films. Advances in Condensed Matter Physics. 2018. Vol. 2018, no. 2018, pp.1-6.
https://search.emarefa.net/detail/BIM-1117169
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1117169