Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition
Joint Authors
Qian, Yingda
Liang, Yuanlan
Luo, Xuguang
He, Kaiyan
Sun, Wenhong
Lin, Hao-Hsiung
Talwar, Devki N.
Chan, Ting-Shan
Ferguson, Ian
Wan, Lingyu
Yang, Qingyi
Feng, Zhe Chuan
Source
Advances in Materials Science and Engineering
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-11, 11 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-07-08
Country of Publication
Egypt
No. of Pages
11
Abstract EN
A series of ultrathin InSb films grown on GaAs by low-pressure metalorganic chemical vapor deposition with different V/III ratios were investigated thoroughly using spectroscopic ellipsometry (SE), X-ray diffraction, and synchrotron radiation X-ray absorption spectroscopy.
The results predicted that InSb films on GaAs grown under too high or too low V/III ratios are with poor quality, while those grown with proper V/III ratios of 4.20–4.78 possess the high crystalline quality.
The temperature-dependent SE (20–300°C) and simulation showed smooth variations of SE spectra, optical constants (n, k, e1, and ε2), and critical energy points (E1, E1+Δ1, E′0, E2, and E′1) for InSb film when temperature increased from 20°C to 250°C, while at 300°C, large changes appeared.
Our study revealed the oxidation of about two atomic layers and the formation of an indium-oxide (InO) layer of ∼5.4 nm.
This indicates the high temperature limitation for the use of InSb/GaAs materials, up to 250°C.
American Psychological Association (APA)
Qian, Yingda& Liang, Yuanlan& Luo, Xuguang& He, Kaiyan& Sun, Wenhong& Lin, Hao-Hsiung…[et al.]. 2018. Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition. Advances in Materials Science and Engineering،Vol. 2018, no. 2018, pp.1-11.
https://search.emarefa.net/detail/BIM-1120968
Modern Language Association (MLA)
Qian, Yingda…[et al.]. Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition. Advances in Materials Science and Engineering No. 2018 (2018), pp.1-11.
https://search.emarefa.net/detail/BIM-1120968
American Medical Association (AMA)
Qian, Yingda& Liang, Yuanlan& Luo, Xuguang& He, Kaiyan& Sun, Wenhong& Lin, Hao-Hsiung…[et al.]. Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition. Advances in Materials Science and Engineering. 2018. Vol. 2018, no. 2018, pp.1-11.
https://search.emarefa.net/detail/BIM-1120968
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1120968