High Reliability and Fast-Speed Phase-Change Memory Based on Sb70Se30SiO2 Multilayer Thin Films
Joint Authors
Zhang, Dan
Hu, Yifeng
You, Haipeng
Zhu, Xiaoqin
Sun, Yuemei
Zou, Hua
Zheng, Yan
Source
Advances in Materials Science and Engineering
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-06-21
Country of Publication
Egypt
No. of Pages
6
Abstract EN
Sb70Se30/SiO2 multilayer thin films were applied to improve the thermal stability by RF magnetron sputtering on SiO2/Si (100) substrates.
The characteristics of Sb70Se30/SiO2 multilayer thin films were investigated in terms of crystallization temperature, ten years of data retention, and energy bandgap.
It is observed that the crystallization temperature, 10-year data retention, and resistance of Sb70Se30/SiO2 multilayer composite thin films exhibited a higher value, suggesting that Sb70Se30/SiO2 multilayer composite thin films have superior thermal stability.
The AFM measurement suggests that the SbSe (1 nm)/SiO (9 nm) multilayer thin films possess a smaller surface roughness (RMS = 0.23 nm).
Besides, it was found that the phase-change time of SbSe (1 nm)/SiO (9 nm) multilayer thin films was shorter than that of GST in the process of crystallization and amorphization.
American Psychological Association (APA)
Zhang, Dan& Hu, Yifeng& You, Haipeng& Zhu, Xiaoqin& Sun, Yuemei& Zou, Hua…[et al.]. 2018. High Reliability and Fast-Speed Phase-Change Memory Based on Sb70Se30SiO2 Multilayer Thin Films. Advances in Materials Science and Engineering،Vol. 2018, no. 2018, pp.1-6.
https://search.emarefa.net/detail/BIM-1122484
Modern Language Association (MLA)
Zhang, Dan…[et al.]. High Reliability and Fast-Speed Phase-Change Memory Based on Sb70Se30SiO2 Multilayer Thin Films. Advances in Materials Science and Engineering No. 2018 (2018), pp.1-6.
https://search.emarefa.net/detail/BIM-1122484
American Medical Association (AMA)
Zhang, Dan& Hu, Yifeng& You, Haipeng& Zhu, Xiaoqin& Sun, Yuemei& Zou, Hua…[et al.]. High Reliability and Fast-Speed Phase-Change Memory Based on Sb70Se30SiO2 Multilayer Thin Films. Advances in Materials Science and Engineering. 2018. Vol. 2018, no. 2018, pp.1-6.
https://search.emarefa.net/detail/BIM-1122484
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1122484
