Design Approaches of MEMS Microphones for Enhanced Performance
Joint Authors
Hur, Shin
Lee, Duck-Gyu
Shah, Muhammad Ali
Shah, Ibrar Ali
Source
Issue
Vol. 2019, Issue 2019 (31 Dec. 2019), pp.1-26, 26 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2019-03-06
Country of Publication
Egypt
No. of Pages
26
Main Subjects
Abstract EN
This paper reports a review about microelectromechanical system (MEMS) microphones.
The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance.
Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level.
A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented.
Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance.
An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented.
The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained.
This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.
American Psychological Association (APA)
Shah, Muhammad Ali& Shah, Ibrar Ali& Lee, Duck-Gyu& Hur, Shin. 2019. Design Approaches of MEMS Microphones for Enhanced Performance. Journal of Sensors،Vol. 2019, no. 2019, pp.1-26.
https://search.emarefa.net/detail/BIM-1191826
Modern Language Association (MLA)
Shah, Muhammad Ali…[et al.]. Design Approaches of MEMS Microphones for Enhanced Performance. Journal of Sensors No. 2019 (2019), pp.1-26.
https://search.emarefa.net/detail/BIM-1191826
American Medical Association (AMA)
Shah, Muhammad Ali& Shah, Ibrar Ali& Lee, Duck-Gyu& Hur, Shin. Design Approaches of MEMS Microphones for Enhanced Performance. Journal of Sensors. 2019. Vol. 2019, no. 2019, pp.1-26.
https://search.emarefa.net/detail/BIM-1191826
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1191826