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Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon
Joint Authors
Shiao, Ming-Hua
Lai, Chou-Pu
Liao, Bo-Huei
Lin, Yung-Sheng
Source
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-08-28
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
Metal-assisted chemical etching (MacEtch) has attracted considerable attention for its ability to fabricate micro- and nanostructures with high aspect ratios and its applications in other microelectromechanical fields.
However, few studies have reported the effect of photoillumination on MacEtch.
In this study, gold nanoparticles (GNPs) were deposited on the surface of a Si wafer by using the fluoride-assisted galvanic replacement reaction, and then, the effect of photoillumination on the MacEtch of the Si wafer was investigated.
The etched depth increased linearly with etching time from 0–45 min and was considerably larger in the illuminated area than the nonilluminated area.
A lag time was observed for the MacEtch of the nonilluminated area.
However, no lag time was observed in the illuminated area.
The trapping of light by the GNPs on the Si substrate surface during the MacEtch process enhanced the etching efficiency due to localized surface plasmon resonance.
American Psychological Association (APA)
Shiao, Ming-Hua& Lai, Chou-Pu& Liao, Bo-Huei& Lin, Yung-Sheng. 2018. Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon. Journal of Nanomaterials،Vol. 2018, no. 2018, pp.1-5.
https://search.emarefa.net/detail/BIM-1194370
Modern Language Association (MLA)
Shiao, Ming-Hua…[et al.]. Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon. Journal of Nanomaterials No. 2018 (2018), pp.1-5.
https://search.emarefa.net/detail/BIM-1194370
American Medical Association (AMA)
Shiao, Ming-Hua& Lai, Chou-Pu& Liao, Bo-Huei& Lin, Yung-Sheng. Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon. Journal of Nanomaterials. 2018. Vol. 2018, no. 2018, pp.1-5.
https://search.emarefa.net/detail/BIM-1194370
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1194370