Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
Joint Authors
Tan, Min
Cao, Zhiqiang
Zhou, Chao
Deng, Lu
Wang, Shuo
Cheng, Long
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-06-19
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Information Technology and Computer Science
Abstract EN
In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent.
The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation.
This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly.
The error of this method and its transfer function are also calculated to compare the iteration method and average method.
The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips.
Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
American Psychological Association (APA)
Zhou, Chao& Deng, Lu& Cheng, Long& Cao, Zhiqiang& Wang, Shuo& Tan, Min. 2017. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization. Scanning،Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1197873
Modern Language Association (MLA)
Zhou, Chao…[et al.]. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization. Scanning No. 2017 (2017), pp.1-8.
https://search.emarefa.net/detail/BIM-1197873
American Medical Association (AMA)
Zhou, Chao& Deng, Lu& Cheng, Long& Cao, Zhiqiang& Wang, Shuo& Tan, Min. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization. Scanning. 2017. Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1197873
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1197873