Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials
Joint Authors
Ambroziak, Andrzej
Winnicki, Marcin
Rutkowska-Gorczyca, Małgorzata
Baszczuk, A.
Jasiorski, M.
Małachowska, A.
Posadowski, W.
Znamirowski, Z.
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-01-09
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Information Technology and Computer Science
Abstract EN
Low-pressure cold spraying is a newly developed technology with high application potential.
The aim of this study was to investigate potential application of this technique for producing a new type of transparent conductive oxide films target.
Cold spraying technique allows the manufacture of target directly on the backing plate; therefore the proposed sputtering target has a form of Sn+In2O3 coating sprayed onto copper substrate.
The microstructure and properties of the feedstock powder prepared using three various methods as well as the deposited ones by low-pressure cold spraying coatings were evaluated, compared, and analysed.
Produced cermet Sn+In2O3 targets were employed in first magnetron sputtering process to deposit preliminary, thin, transparent conducting oxide films onto the glass substrates.
The resistivity of obtained preliminary films was measured and allows believing that fabrication of TCO (transparent conducting oxide) films using targets produced by cold spraying is possible in the future, after optimization of the deposition conditions.
American Psychological Association (APA)
Winnicki, Marcin& Baszczuk, A.& Rutkowska-Gorczyca, Małgorzata& Jasiorski, M.& Małachowska, A.& Posadowski, W.…[et al.]. 2017. Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials. Scanning،Vol. 2017, no. 2017, pp.1-10.
https://search.emarefa.net/detail/BIM-1197876
Modern Language Association (MLA)
Winnicki, Marcin…[et al.]. Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials. Scanning No. 2017 (2017), pp.1-10.
https://search.emarefa.net/detail/BIM-1197876
American Medical Association (AMA)
Winnicki, Marcin& Baszczuk, A.& Rutkowska-Gorczyca, Małgorzata& Jasiorski, M.& Małachowska, A.& Posadowski, W.…[et al.]. Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials. Scanning. 2017. Vol. 2017, no. 2017, pp.1-10.
https://search.emarefa.net/detail/BIM-1197876
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1197876