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Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
Joint Authors
Hu, Xiaodong
Hu, Xiaotang
Liu, Lu
Xu, Jianguo
Zhang, Rui
Wu, Sen
Source
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-07-19
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Information Technology and Computer Science
Abstract EN
This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization.
The cantilever probe with flared tip was used in a home-made 3D-AFM system.
The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resonance frequency.
The vertical resonance mode was used for upper surface imaging, and the torsional resonance mode was used for sidewall detecting.
The 3D-AFM was applied to measure standard gratings with the height of 100 nm and 200 nm.
The experiment results showed that the presented 3D-AFM technique was able to detect the small defect features on the steep sidewall and to reconstruct the 3D topography of the measured structure.
American Psychological Association (APA)
Liu, Lu& Xu, Jianguo& Zhang, Rui& Wu, Sen& Hu, Xiaodong& Hu, Xiaotang. 2018. Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode. Scanning،Vol. 2018, no. 2018, pp.1-8.
https://search.emarefa.net/detail/BIM-1212997
Modern Language Association (MLA)
Liu, Lu…[et al.]. Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode. Scanning No. 2018 (2018), pp.1-8.
https://search.emarefa.net/detail/BIM-1212997
American Medical Association (AMA)
Liu, Lu& Xu, Jianguo& Zhang, Rui& Wu, Sen& Hu, Xiaodong& Hu, Xiaotang. Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode. Scanning. 2018. Vol. 2018, no. 2018, pp.1-8.
https://search.emarefa.net/detail/BIM-1212997
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1212997