Influence of shape design of MEMS (micro-cantilever based sensor)‎ on high-sensitivity

Abstract EN

In this paper, a novel analysis was carried out on the biosensor micro cantilevers in order to increase the sensitivity of a micro-cantilever based biosensor piezoresistive.

Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever.

Effect of changing the micro-cantilevers profile and its cross-section shape was investigated.

A finite element ANSYS was used to analyze these models.

The micro-cantilevers are made of silicon with elastic modulus 130Gpa and poisson’s ratio 0.28.

Several cases were studied by making one, two and three holes in each biosensor piezoresistive micro-cantilevers (rectangular (R), triangular (T), and step(S) profile cantilever).

Results showed that triangular micro-cantilever with two holes (T22) has the better sensitivity, also showed T12 respectively 61.7 % and 65 % higher sensitivity than R12, S12.