Theoretical study and simulation of corrugated silicon diaphragms

Abstract EN

In this paper, silicon diaphragms with planar and corrugated shapes are studied through both theory and simulations.

The analytical calculations of deflections are compared with FEM simulations with good agreement.

The results show that linear load-deflection relationship can be obtained by increasing corrugation depth and corrugation pitch did not show any noticeable effect compared to other parameters.

Therefore the rule of thumb in the design of a corrugated diaphragm is that increasing diaphragm diameter and / or decreasing diaphragm thickness increase diaphragm sensitivity and that increasing corrugation depth increases the linearity of load deflection relation.