3D quantum numerical simulation of horizontal rectangular dual metal (Aluminum, Titanium)‎ gate \ gate all around MOSFETs

Joint Authors

khaouani, M.
Guen, A.
Bu Azzah, B.
Kurdi, Z.
Bendermel, O.

Source

Journal of New Technology and Materials / Larbi Ben M'hidi Oum el-Bouaghi University.

Publisher

Larbi Ben M'hidi Oum el-Bouaghi University

Publication Date

2014-05-31

Country of Publication

Algeria

No. of Pages

5

Main Subjects

Electronic engineering

Topics

• Microelectronics
• Electronic circuits
• Integrated circuits

English Abstract

The integrity and issues related to electrostatic performance associated with scaling Si MOSFET bulk sub 10 nm channel length promotes research in new device architectures such as SOI, double gate and GAA MOSFET [1], In this paper, we present some novel characteristic of horizontal rectangular gate\gate all around MOSFETs with dual metal of gate we obtained using SILVACO TCAD tools.

We will also exhibit some simulation results we obtained relating to the influence of some parameters variation on our structure and the S parameter (S11, S12, S21, S22), that having a direct impact on their threshold voltage and drain current.

In addition, our TFET showed reasonable Ion/Ioff ratio of (104) and low drain induced barrier lowering (DIBL) of 39mV / V.

Data Type

Conference Papers

Record ID

BIM-429625

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