The effect of chemical polishing on polysilicon surface
Joint Authors
Dhannun, H. H.
Husayn, M. M. S.
Hassan, Y. M.
Abbud, S. K.
Source
Mu'tah Journal for Research and Studies : Natural and Applied Sciences Series
Issue
Vol. 9, Issue 1 (31 Jul. 1994), pp.57-69, 13 p.
Publisher
Mutah University Deanship of Academic Research
Publication Date
1994-07-31
Country of Publication
Jordan
No. of Pages
13
Main Subjects
Abstract EN
Chemical polishing of polysilicon (Poly Si) has been investigated us-ing scanning electron microscopy (SEM), reflectance spectrophotometry and dark electrical [-٧ measurements.
It was observed that chemical pol-ishing affects surface roughness and shows deeper etching at grain boun-daries.
It was also found that etching by solution A for 15 minutes pro-duces a low reflectivity surface and better quality Al-poly Si (P-type) Schottky diodes.
American Psychological Association (APA)
Hassan, Y. M.& Dhannun, H. H.& Husayn, M. M. S.& Abbud, S. K.. 1994. The effect of chemical polishing on polysilicon surface. Mu'tah Journal for Research and Studies : Natural and Applied Sciences Series،Vol. 9, no. 1, pp.57-69.
https://search.emarefa.net/detail/BIM-436726
Modern Language Association (MLA)
Hassan, Y. M.…[et al.]. The effect of chemical polishing on polysilicon surface. Mu'tah Journal for Research and Studies : Natural and Applied Sciences Series Vol. 9, no. 1 (Jul. 1994), pp.57-69.
https://search.emarefa.net/detail/BIM-436726
American Medical Association (AMA)
Hassan, Y. M.& Dhannun, H. H.& Husayn, M. M. S.& Abbud, S. K.. The effect of chemical polishing on polysilicon surface. Mu'tah Journal for Research and Studies : Natural and Applied Sciences Series. 1994. Vol. 9, no. 1, pp.57-69.
https://search.emarefa.net/detail/BIM-436726
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 69
Record ID
BIM-436726
