Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting
Joint Authors
Shoji, Shuichi
Ishibashi, Kentaro
Mizuno, Jun
Goto, Hiroshi
Source
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-08-23
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Engineering Sciences and Information Technology
Chemistry
Abstract EN
Step-and-repeat UV nanoimprinting for large-scale nanostructure fabrication under atmospheric pressure was realized using high-viscosity photocurable resin and a simple nanoimprinting system.
In step-and-repeat UV nanoimprinting under atmospheric pressure using low-viscosity resin, large-scale nanostructure fabrication is very difficult, due to bubble defects and nonuniformity of the residual layer.
To minimize bubble defects and nonuniformity of the residual layer, we focused on the damping effects of photocurable resin viscosity.
Fabrication of 165 dies was successfully demonstrated in a 130×130 mm2 area on an 8 in silicon substrate by step-and-repeat UV nanoimprinting under atmospheric pressure using high-viscosity photocurable resin.
Nanostructures with widths and spacing patterns from 80 nm to 3 μm and 200 nm depth were formed using a quartz mold.
Bubble defects were not observed, and residual layer uniformity was within 30 nm ±10%.
This study reports on simple step-and-repeat UV nanoimprinting under atmospheric pressure using high-viscosity photocurable resin, as a very widely available method for large-scale mass production of nanostructures.
American Psychological Association (APA)
Ishibashi, Kentaro& Goto, Hiroshi& Mizuno, Jun& Shoji, Shuichi. 2012. Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting. Journal of Nanotechnology،Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-446561
Modern Language Association (MLA)
Ishibashi, Kentaro…[et al.]. Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting. Journal of Nanotechnology No. 2012 (2012), pp.1-9.
https://search.emarefa.net/detail/BIM-446561
American Medical Association (AMA)
Ishibashi, Kentaro& Goto, Hiroshi& Mizuno, Jun& Shoji, Shuichi. Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting. Journal of Nanotechnology. 2012. Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-446561
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-446561