Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide
Joint Authors
Soliman, Moataz B.
Fathy, Marwa
Kashyout, Abd El-Hady B.
Source
International Journal of Photoenergy
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-05-29
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
The ceramic target of Indium tinoxide (ITO) (90% In2O3-10%SnO2) has been used to prepare transparent semiconductive thin films on glass substrate by RF magnetron sputtering at room temperature.
The properties of the thin films are affected by controlling the deposition parameters, namely, RF power values and deposition times.
The structure, morphology, optical and electrical properties of the thin films are investigated using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), atomic force microscope (AFM), UV-Vis spectrophotometer, and four-point probe measurement.
Nanoparticles of 10–20 nm are measured and confirmed using both FESEM and AFM.
The main preferred orientations of the prepared thin films are (222) and (400) of the cubic ITO structure.
The transparent semiconductive films have high transmittance within the visible range of values 80–90% and resistivity of about 1.62×10−4 Ω⋅cm.
American Psychological Association (APA)
Kashyout, Abd El-Hady B.& Fathy, Marwa& Soliman, Moataz B.. 2011. Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide. International Journal of Photoenergy،Vol. 2011, no. 2011, pp.1-6.
https://search.emarefa.net/detail/BIM-448855
Modern Language Association (MLA)
Kashyout, Abd El-Hady B.…[et al.]. Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide. International Journal of Photoenergy No. 2011 (2011), pp.1-6.
https://search.emarefa.net/detail/BIM-448855
American Medical Association (AMA)
Kashyout, Abd El-Hady B.& Fathy, Marwa& Soliman, Moataz B.. Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide. International Journal of Photoenergy. 2011. Vol. 2011, no. 2011, pp.1-6.
https://search.emarefa.net/detail/BIM-448855
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-448855