Effect of Processing Parameters on Thickness of Columnar Structured Silicon Wafers Directly Grown from Silicon Melts
Joint Authors
Lee, Jin-Seok
Ahn, Young-Soo
Jang, Bo-Yun
Source
International Journal of Photoenergy
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-02-06
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
In order to obtain optimum growth conditions for desired thickness and more effective silicon feedstock usage, effects of processing parameters such as preheated substrate temperatures, time intervals, moving velocity of substrates, and Ar gas blowing rates on silicon ribbon thickness were investigated in the horizontal growth process.
Most of the parameters strongly affected in the control of ribbon thickness with columnar grain structure depended on the solidification rate.
The thickness of the silicon ribbon decreased with an increasing substrate temperature, decreasing time interval, and increasing moving velocity of the substrate.
However, the blowing of Ar gas onto a liquid layer existing on the surface of solidified ribbon contributed to achieving smooth surface roughness but did not closely affect the change of ribbon thickness in the case of a blowing rate of ≥0.65 Nm3/h because the thickness of the solidified layer was already determined by the exit height of the reservoir.
American Psychological Association (APA)
Lee, Jin-Seok& Jang, Bo-Yun& Ahn, Young-Soo. 2012. Effect of Processing Parameters on Thickness of Columnar Structured Silicon Wafers Directly Grown from Silicon Melts. International Journal of Photoenergy،Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-449490
Modern Language Association (MLA)
Lee, Jin-Seok…[et al.]. Effect of Processing Parameters on Thickness of Columnar Structured Silicon Wafers Directly Grown from Silicon Melts. International Journal of Photoenergy No. 2012 (2012), pp.1-6.
https://search.emarefa.net/detail/BIM-449490
American Medical Association (AMA)
Lee, Jin-Seok& Jang, Bo-Yun& Ahn, Young-Soo. Effect of Processing Parameters on Thickness of Columnar Structured Silicon Wafers Directly Grown from Silicon Melts. International Journal of Photoenergy. 2012. Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-449490
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-449490