Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD
Joint Authors
Monroy, B. M.
García-Sánchez, M. F.
Remolina Millán, Aduljay
Picquart, M.
Santana, G.
Ponce, A.
Source
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-12-29
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Engineering Sciences and Information Technology
Chemistry
Civil Engineering
Abstract EN
Silicon nanocrystals embedded in amorphous silicon matrix were obtained by plasma enhanced chemical vapor deposition using dichlorosilane as silicon precursor.
The RF power and dichlorosilane to hydrogen flow rate ratio were varied to obtain different crystalline fractions and average sizes of silicon nanocrystals.
High-resolution transmission electron microscopy images and RAMAN measurements confirmed the existence of nanocrystals embedded in the amorphous matrix with average sizes between 2 and 6 nm.
Different crystalline fractions (from 12% to 54%) can be achieved in these films by regulating the selected growth parameters.
The global optical constants of the films were obtained by UV-visible transmittance measurements.
Effective band gap variations from 1.78 to 2.3 eV were confirmed by Tauc plot method.
Absorption coefficients higher than standard amorphous silicon were obtained in these thin films for specific growth parameters.
The relationship between the optical properties is discussed in terms of the different internal nanostructures of the samples.
American Psychological Association (APA)
Monroy, B. M.& Remolina Millán, Aduljay& García-Sánchez, M. F.& Ponce, A.& Picquart, M.& Santana, G.. 2010. Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD. Journal of Nanomaterials،Vol. 2011, no. 2011, pp.1-9.
https://search.emarefa.net/detail/BIM-453174
Modern Language Association (MLA)
Monroy, B. M.…[et al.]. Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD. Journal of Nanomaterials No. 2011 (2011), pp.1-9.
https://search.emarefa.net/detail/BIM-453174
American Medical Association (AMA)
Monroy, B. M.& Remolina Millán, Aduljay& García-Sánchez, M. F.& Ponce, A.& Picquart, M.& Santana, G.. Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD. Journal of Nanomaterials. 2010. Vol. 2011, no. 2011, pp.1-9.
https://search.emarefa.net/detail/BIM-453174
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-453174