Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution
Joint Authors
Chiou, Chyow-San
Chen, Hua-Wei
Lin, Ya-Fen
Chuang, Kai-Jen
Ma, Chih-Ming
Source
International Journal of Photoenergy
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-11-25
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater.
This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O4) and O3, denoted as UV/O3, to TMAH in an aqueous solution.
The mineralization efficiency of TMAH under various conditions follows the sequence: UV/O3 > UV/H2O2/O3 > H2O2/SiO2/Fe3O4/O3 > H2O2/O3 > SiO2/Fe3O4/O3 > O3 > UV/H2O2.
The results suggest that UV/O3 process provides the best condition for the mineralization of TMAH (40 mg/L), resulting in 87.6% mineralization, at 60 min reaction time.
Furthermore, the mineralization efficiency of SiO2/Fe3O4/H2O2/O3 was significantly higher than that of O3, H2O2/O3, and UV/H2O2.
More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse.
American Psychological Association (APA)
Chiou, Chyow-San& Chuang, Kai-Jen& Lin, Ya-Fen& Chen, Hua-Wei& Ma, Chih-Ming. 2013. Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution. International Journal of Photoenergy،Vol. 2013, no. 2013, pp.1-7.
https://search.emarefa.net/detail/BIM-453255
Modern Language Association (MLA)
Chiou, Chyow-San…[et al.]. Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution. International Journal of Photoenergy No. 2013 (2013), pp.1-7.
https://search.emarefa.net/detail/BIM-453255
American Medical Association (AMA)
Chiou, Chyow-San& Chuang, Kai-Jen& Lin, Ya-Fen& Chen, Hua-Wei& Ma, Chih-Ming. Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution. International Journal of Photoenergy. 2013. Vol. 2013, no. 2013, pp.1-7.
https://search.emarefa.net/detail/BIM-453255
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-453255