Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect
Joint Authors
Source
Journal of Applied Mathematics
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-05-26
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
Evaluation of squeezed film air damping is critical in the design and control of dynamic MEMS devices.
The published squeezed film air damping models are generally derived from the analytical solutions of Reynolds equation or its other modified forms under the supposition of trivial pressure boundary conditions on the peripheral borders.
These treatments ignoring the border effect can not give faithful result for structure with smaller air venting gap or the double-gimbaled structure in which the inner frame and outer one affect the air venting.
In this paper, we use Green’s function to solve the nonlinear Reynolds equation with inhomogeneous boundary conditions.
For two typical normal motion cases of parallel plate, the analytical models of squeeze film damping force with border effect are established.
The viscous and inertial losses with real values and image values acoustic impedance are all included in the model.
These models reduced the time consumption while giving satisfactory result.
Without multifield coupling analysis, the estimation of the dynamic behavior of MEMS device is also allowed, and the simulation of the system performance is more convenient.
American Psychological Association (APA)
Bai, Cheng& Huang, Jin. 2014. Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect. Journal of Applied Mathematics،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-453364
Modern Language Association (MLA)
Bai, Cheng& Huang, Jin. Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect. Journal of Applied Mathematics No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-453364
American Medical Association (AMA)
Bai, Cheng& Huang, Jin. Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect. Journal of Applied Mathematics. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-453364
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-453364