Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films
Joint Authors
Volodin, Vladimir A.
Zelenina, Anastasia A.
Bugaev, Kirill O.
Source
International Journal of Spectroscopy
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-10-02
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
Vibrational properties of hydrogenated silicon-rich nitride (SiNx:H) of various stoichiometry (0.6≤x≤1.3) and hydrogenated amorphous silicon (a-Si:H) films were studied using Raman spectroscopy and Fourier transform infrared spectroscopy.
Furnace annealing during 5 hours in Ar ambient at 1130°C and pulse laser annealing were applied to modify the structure of films.
Surprisingly, after annealing with such high-thermal budget, according to the FTIR data, the nearly stoichiometric silicon nitride film contains hydrogen in the form of Si–H bonds.
From analysis of the FTIR data of the Si–N bond vibrations, one can conclude that silicon nitride is partly crystallized.
According to the Raman data a-Si:H films with hydrogen concentration 15% and lower contain mainly Si–H chemical species, and films with hydrogen concentration 30–35% contain mainly Si–H2 chemical species.
Nanosecond pulse laser treatments lead to crystallization of the films and its dehydrogenization.
American Psychological Association (APA)
Bugaev, Kirill O.& Zelenina, Anastasia A.& Volodin, Vladimir A.. 2011. Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films. International Journal of Spectroscopy،Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-460050
Modern Language Association (MLA)
Bugaev, Kirill O.…[et al.]. Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films. International Journal of Spectroscopy No. 2012 (2012), pp.1-5.
https://search.emarefa.net/detail/BIM-460050
American Medical Association (AMA)
Bugaev, Kirill O.& Zelenina, Anastasia A.& Volodin, Vladimir A.. Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films. International Journal of Spectroscopy. 2011. Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-460050
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-460050