A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization
Joint Authors
Rocha, L. A.
Mol, L.
Machado da Silva, José
Wolffenbuttel, R. F.
Cretu, Edmond
Source
Issue
Vol. 2008, Issue 2008 (31 Dec. 2008), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2008-04-06
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-in voltages and resonance frequency, is described.
Using this combination of measurements, one can estimate process-induced variations in the device layout dimensions as well as deviations from nominal value in material properties, which can be used either for testing or device diagnostics purposes.
Measurements performed on fabricated devices confirm that the 250 nm overetch observed on SEM images can be correctly estimated using the proposed technique.
American Psychological Association (APA)
Rocha, L. A.& Mol, L.& Cretu, Edmond& Wolffenbuttel, R. F.& Machado da Silva, José. 2008. A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization. VLSI Design،Vol. 2008, no. 2008, pp.1-7.
https://search.emarefa.net/detail/BIM-460183
Modern Language Association (MLA)
Rocha, L. A.…[et al.]. A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization. VLSI Design No. 2008 (2008), pp.1-7.
https://search.emarefa.net/detail/BIM-460183
American Medical Association (AMA)
Rocha, L. A.& Mol, L.& Cretu, Edmond& Wolffenbuttel, R. F.& Machado da Silva, José. A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization. VLSI Design. 2008. Vol. 2008, no. 2008, pp.1-7.
https://search.emarefa.net/detail/BIM-460183
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-460183
