Model of PE-CVD Apparatus : Verification and Simulations

Abstract EN

In this paper, we present a simulation of chemical vapor deposition with metallic bipolar plates.

In chemical vapor deposition, a delicate optimization between temperature, pressure and plasma power is important to obtain homogeneous deposition.

The aim is to reduce the number of real-life experiments in a given CVD plasma reactor.

Based on the large physical parameter space, there are a hugh number of possible experiments.

A detailed study of the physical experiments in a CVD plasma reactor allows to reduce the problem to an approximate mathematical model, which is the underlying transport-reaction model.

Significant regions of the CVD apparatus are approximated and physical parameters are transferred to the mathematical parameters.

Such an approximation reduces the mathematical parameter space to a realistic number of numerical experiments.

The numerical results are discussed with physical experiments to give a valid model for the assumed growth and we could reduce expensive physical experiments.