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Ta2O5 Thin Films for Capacitive RF MEMS Switches
Joint Authors
De Angelis, Giorgio
Marcelli, Romolo
Siciliano, Pietro
Quaranta, Fabio
Taurino, Antonietta
Persano, Anna
Cola, Adriano
Source
Issue
Vol. 2010, Issue 2010 (31 Dec. 2010), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-12-28
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
Shunt capacitive RF MEMS switches have been developed using III-V technology and employing (tantalum pentoxide) Ta2O5 thin films as dielectric layers.
In order to evaluate the potential of the Ta2O5 thin films for the considered application, the compositional, structural, and electrical characterization of the deposited films has been performed, demonstrating that they are good candidates to be used as dielectric layers for the fabrication of RF MEMS switches.
Specifically, Ta2O5 films are found to show a leakage current density of few nA/cm2 for E∼1 MV/cm and a high dielectric constant of 32.
Moreover, the charging process has been investigated, finding that it follows a stretched exponential law.
The fabricated switches show actuation voltages in the range 15–20 V, an insertion loss better than −0.8 dB up to 30 GHz, and an isolation of ~−40 dB at the resonant frequency which is around 25 GHz.
American Psychological Association (APA)
Persano, Anna& Quaranta, Fabio& Cola, Adriano& Taurino, Antonietta& De Angelis, Giorgio& Marcelli, Romolo…[et al.]. 2010. Ta2O5 Thin Films for Capacitive RF MEMS Switches. Journal of Sensors،Vol. 2010, no. 2010, pp.1-5.
https://search.emarefa.net/detail/BIM-475536
Modern Language Association (MLA)
Persano, Anna…[et al.]. Ta2O5 Thin Films for Capacitive RF MEMS Switches. Journal of Sensors No. 2010 (2010), pp.1-5.
https://search.emarefa.net/detail/BIM-475536
American Medical Association (AMA)
Persano, Anna& Quaranta, Fabio& Cola, Adriano& Taurino, Antonietta& De Angelis, Giorgio& Marcelli, Romolo…[et al.]. Ta2O5 Thin Films for Capacitive RF MEMS Switches. Journal of Sensors. 2010. Vol. 2010, no. 2010, pp.1-5.
https://search.emarefa.net/detail/BIM-475536
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-475536