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PECVD Silicon Nitride Passivation on Boron Emitter : The Analysis of Electrostatic Charge on the Interface Properties
Joint Authors
Ren, Yongling
Weber, Klaus J.
Nursam, Natalita M.
Source
Issue
Vol. 2010, Issue 2010 (31 Dec. 2010), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-06-29
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
The dependence of surface recombination of boron diffused and undiffused silicon surfaces passivated with a-SiNx:H on the net charge density is investigated in detail.
The films are deposited by plasma-enhanced chemical vapour deposition using a 2.45 GHz microwave remote plasma system.
The surface charge density on the samples is varied by depositing charge using a corona discharge chamber.
Excess carrier lifetime, capacitance-voltage, and Kelvin probe measurements are combined to determine the surface recombination velocity and emitter saturation current density as a function of net charge density.
Our results show that the application of negative charge causes a substantial reduction in the surface recombination of samples with boron diffused emitters, even for high boron surface concentrations of 5×1019 cm−3.
The significant difference observed in surface recombination between boron diffused and undiffused sample under accumulation implies that the presence of boron diffusion has results in some degradation of the Si-SiNx interface.
Further, (111) oriented surfaces appear more sensitive to the boron surface concentration than (100) oriented surfaces.
American Psychological Association (APA)
Nursam, Natalita M.& Ren, Yongling& Weber, Klaus J.. 2010. PECVD Silicon Nitride Passivation on Boron Emitter : The Analysis of Electrostatic Charge on the Interface Properties. Advances in OptoElectronics،Vol. 2010, no. 2010, pp.1-8.
https://search.emarefa.net/detail/BIM-475576
Modern Language Association (MLA)
Nursam, Natalita M.…[et al.]. PECVD Silicon Nitride Passivation on Boron Emitter : The Analysis of Electrostatic Charge on the Interface Properties. Advances in OptoElectronics No. 2010 (2010), pp.1-8.
https://search.emarefa.net/detail/BIM-475576
American Medical Association (AMA)
Nursam, Natalita M.& Ren, Yongling& Weber, Klaus J.. PECVD Silicon Nitride Passivation on Boron Emitter : The Analysis of Electrostatic Charge on the Interface Properties. Advances in OptoElectronics. 2010. Vol. 2010, no. 2010, pp.1-8.
https://search.emarefa.net/detail/BIM-475576
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-475576