Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization
Joint Authors
Umeda, Junko
Kondoh, Katsuyoshi
Fujita, Junji
Serikawa, Tadashi
Source
Advances in Materials Science and Engineering
Issue
Vol. 2008, Issue 2008 (31 Dec. 2008), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-01-14
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
Zr-Cu amorphous films were prepared by radio-frequency (RF) magnetron sputtering on glass substrate using two kinds of the elemental composite targets: Cu chips on Zr plate and Zr chips on Cu plate.
It was easy to precisely control chemical compositions of sputtered films by selecting the chip metal and the number of chips.
It is possible to accurately estimate the film compositions by using the sputtered area and the deposition rate of Cu and Zr.
XRD analysis on every as-sputtered film showed the broadened pattern.
Zr-rich composition film, however, revealed a small peak at the diffraction angle of 2θ=35∘, and Cu-rich one indicated it at 2θ=43∘.
TEM and electron diffraction analysis on the former also showed the main Zr ring patterns and its streaks.
Zr-rich composition film with Cu content of 34 at% or less indicated a good corrosion resistance by salt spray test.
On the other hand, Cu-rich version with 74 at% Cu or more was poor in corrosion resistance.
This was because Zr was reactively passive, and caused the spontaneous formation of a hard non-reactive surface film that inhibited further corrosion than Cu.
American Psychological Association (APA)
Kondoh, Katsuyoshi& Fujita, Junji& Umeda, Junko& Serikawa, Tadashi. 2009. Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization. Advances in Materials Science and Engineering،Vol. 2008, no. 2008, pp.1-5.
https://search.emarefa.net/detail/BIM-478070
Modern Language Association (MLA)
Kondoh, Katsuyoshi…[et al.]. Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization. Advances in Materials Science and Engineering No. 2008 (2008), pp.1-5.
https://search.emarefa.net/detail/BIM-478070
American Medical Association (AMA)
Kondoh, Katsuyoshi& Fujita, Junji& Umeda, Junko& Serikawa, Tadashi. Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization. Advances in Materials Science and Engineering. 2009. Vol. 2008, no. 2008, pp.1-5.
https://search.emarefa.net/detail/BIM-478070
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-478070