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Purity of Ion Beams : Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation
Joint Authors
Häublein, Volker
Frey, Lothar
Ryssel, Heiner
Source
Advances in Materials Science and Engineering
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-11-14
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
This paper shows that charge exchange events and dissociation reactions of ions may impact the purity of the ion beam in ion implantation, leading to contamination of the implanted target.
Physical relations are derived that explain why unwanted ions are transported in the ion beam despite of a magnetic mass separation.
Based on those relations, the simulation tool ENCOTION (ENergetic COntamination simulaTION) has been developed.
ENCOTION is a very powerful tool for the simulation of transport mechanisms of ions through a magnet analyzer and for the simulation of mass spectra, as will be demonstrated in this paper.
American Psychological Association (APA)
Häublein, Volker& Ryssel, Heiner& Frey, Lothar. 2011. Purity of Ion Beams : Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation. Advances in Materials Science and Engineering،Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-484906
Modern Language Association (MLA)
Häublein, Volker…[et al.]. Purity of Ion Beams : Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation. Advances in Materials Science and Engineering No. 2012 (2012), pp.1-9.
https://search.emarefa.net/detail/BIM-484906
American Medical Association (AMA)
Häublein, Volker& Ryssel, Heiner& Frey, Lothar. Purity of Ion Beams : Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation. Advances in Materials Science and Engineering. 2011. Vol. 2012, no. 2012, pp.1-9.
https://search.emarefa.net/detail/BIM-484906
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-484906