Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate
Joint Authors
Jin, Hao
Dong, Shurong
Feng, Bing
Zhou, Jian
Wang, Demiao
Source
Journal of Control Science and Engineering
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-10-03
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Electronic engineering
Information Technology and Computer Science
Abstract EN
Surface acoustic wave device with c-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems.
In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highly c-axis-oriented AlN film on polymer substrates.
Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.
American Psychological Association (APA)
Zhou, Jian& Dong, Shurong& Jin, Hao& Feng, Bing& Wang, Demiao. 2012. Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate. Journal of Control Science and Engineering،Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-484907
Modern Language Association (MLA)
Zhou, Jian…[et al.]. Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate. Journal of Control Science and Engineering No. 2012 (2012), pp.1-5.
https://search.emarefa.net/detail/BIM-484907
American Medical Association (AMA)
Zhou, Jian& Dong, Shurong& Jin, Hao& Feng, Bing& Wang, Demiao. Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate. Journal of Control Science and Engineering. 2012. Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-484907
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-484907