Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope
Joint Authors
Holburn, David
Chuah, Joon Huang
Source
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-06-28
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
This paper presents a novel method of detecting secondary electrons generated in the scanning electron microscope (SEM).
The method suggests that the photomultiplier tube (PMT), traditionally used in the Everhart-Thornley (ET) detector, is to be replaced with a configurable multipixel solid-state photon detector offering the advantages of smaller dimension, lower supply voltage and power requirements, and potentially cheaper product cost.
The design of the proposed detector has been implemented using a standard 0.35 μm CMOS technology with optical enhancement.
This microchip comprises main circuit constituents of an array of photodiodes connecting to respective noise-optimised transimpedance amplifiers (TIAs), a selector-combiner (SC) circuit, and a postamplifier (PA).
The design possesses the capability of detecting photons with low input optical power in the range of 1 nW with 100 μm × 100 μm sized photodiodes and achieves a total amplification of 180 dBΩ at the output.
American Psychological Association (APA)
Chuah, Joon Huang& Holburn, David. 2011. Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope. Advances in OptoElectronics،Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-488037
Modern Language Association (MLA)
Chuah, Joon Huang& Holburn, David. Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope. Advances in OptoElectronics No. 2011 (2011), pp.1-7.
https://search.emarefa.net/detail/BIM-488037
American Medical Association (AMA)
Chuah, Joon Huang& Holburn, David. Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope. Advances in OptoElectronics. 2011. Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-488037
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-488037