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Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity
Joint Authors
Nayak, Maheswar
Lodha, Gyanendra S.
Source
Journal of Atomic, Molecular, and Optical Physics
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-23, 23 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-04-11
Country of Publication
Egypt
No. of Pages
23
Main Subjects
Abstract EN
Fine structure features of energy-dependent atomic scattering factor near the atomic absorption edge, are used for structural analysis of low-Z containing thin film structures.
The scattering contrast undergoes large and abrupt change as the incident photon energy approaches the natural frequency of the atom and is sensitive to variation in atomic composition and atomic density.
Soft X-ray resonant reflectivity is utilized for determination of composition at the buried interfaces with subnanometer sensitivity.
This is demonstrated through characterization of Mo/Si multilayers near Si L-edge.
We also demonstrate the possibility of probing variation of atomic density in thin films, through the characterization of Fe/B4C structure, near B K-edge.
Sensitivity of soft X-ray resonant reflectivity to native oxide is demonstrated through characterization of BN films near B K-edge.
American Psychological Association (APA)
Nayak, Maheswar& Lodha, Gyanendra S.. 2011. Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity. Journal of Atomic, Molecular, and Optical Physics،Vol. 2011, no. 2011, pp.1-23.
https://search.emarefa.net/detail/BIM-488097
Modern Language Association (MLA)
Nayak, Maheswar& Lodha, Gyanendra S.. Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity. Journal of Atomic, Molecular, and Optical Physics No. 2011 (2011), pp.1-23.
https://search.emarefa.net/detail/BIM-488097
American Medical Association (AMA)
Nayak, Maheswar& Lodha, Gyanendra S.. Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity. Journal of Atomic, Molecular, and Optical Physics. 2011. Vol. 2011, no. 2011, pp.1-23.
https://search.emarefa.net/detail/BIM-488097
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-488097