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An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments
Joint Authors
Jia, Chunrong
Lee, Ike Woo
Choi, Young Seok
Kim, Yong Doo
Pham, Tien Thang
Kim, Hong Hyun
Seo, Young Un
Lee, Jae Hwan
Source
International Journal of Analytical Chemistry
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-08-23
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Abstract EN
Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations.
This study develops a thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) method for measuring trace-level TMSOH in occupational indoor air.
Laboratory method optimization obtained best performance when using dual-bed tube configuration (100 mg of Tenax TA followed by 100 mg of Carboxen 569), n-decane as a solvent, and a TD temperature of 300°C.
The optimized method demonstrated high recovery (87%), satisfactory precision (<15% for spiked amounts exceeding 1 ng), good linearity (R2=0.9999), a wide dynamic mass range (up to 500 ng), low method detection limit (2.8 ng m−3 for a 20-L sample), and negligible losses for 3-4-day storage.
The field study showed performance comparable to that in laboratory and yielded first measurements of TMSOH, ranging from 1.02 to 27.30 μg/m3, in the semiconductor industry.
We suggested future development of real-time monitoring techniques for TMSOH and other siloxanes for better maintenance and control of scanner lens in semiconductor wafer manufacturing.
American Psychological Association (APA)
Lee, Jae Hwan& Jia, Chunrong& Kim, Yong Doo& Kim, Hong Hyun& Pham, Tien Thang& Choi, Young Seok…[et al.]. 2012. An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments. International Journal of Analytical Chemistry،Vol. 2012, no. 2012, pp.1-10.
https://search.emarefa.net/detail/BIM-490808
Modern Language Association (MLA)
Lee, Jae Hwan…[et al.]. An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments. International Journal of Analytical Chemistry No. 2012 (2012), pp.1-10.
https://search.emarefa.net/detail/BIM-490808
American Medical Association (AMA)
Lee, Jae Hwan& Jia, Chunrong& Kim, Yong Doo& Kim, Hong Hyun& Pham, Tien Thang& Choi, Young Seok…[et al.]. An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments. International Journal of Analytical Chemistry. 2012. Vol. 2012, no. 2012, pp.1-10.
https://search.emarefa.net/detail/BIM-490808
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-490808