Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements
Joint Authors
Solcansky, M.
Poruba, Aleš
Vanek, Jiří
Source
International Journal of Photoenergy
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-4, 4 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-04-26
Country of Publication
Egypt
No. of Pages
4
Main Subjects
Abstract EN
For the measurement of the minority carrier bulk-lifetime the characterization method MW-PCD is used, where the result of measurement is the effective carrier lifetime, which is very dependent on the surface recombination velocity and therefore on the quality of a silicon surface passivation.
This work deals with an examination of a different solution types for the chemical passivation of a silicon surface.
Various solutions are tested on silicon wafers for their consequent comparison.
The main purpose is to find optimal solution, which suits the requirements of a time stability and start-up velocity of passivation, reproducibility of the measurements and a possibility of a perfect cleaning of a passivating solution remains from a silicon surface, so that the parameters of a measured silicon wafer will not worsen and there will not be any contamination of the other wafers series in the production after a repetitive return of the measured wafer into the production process.
The cleaning process itself is also a subject of a development.
American Psychological Association (APA)
Solcansky, M.& Vanek, Jiří& Poruba, Aleš. 2012. Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements. International Journal of Photoenergy،Vol. 2012, no. 2012, pp.1-4.
https://search.emarefa.net/detail/BIM-494322
Modern Language Association (MLA)
Solcansky, M.…[et al.]. Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements. International Journal of Photoenergy No. 2012 (2012), pp.1-4.
https://search.emarefa.net/detail/BIM-494322
American Medical Association (AMA)
Solcansky, M.& Vanek, Jiří& Poruba, Aleš. Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements. International Journal of Photoenergy. 2012. Vol. 2012, no. 2012, pp.1-4.
https://search.emarefa.net/detail/BIM-494322
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-494322