Synthesis and Dielectric Studies of Monoclinic Nanosized Zirconia
Joint Authors
Paul, Aswathy
Prabha, V. Lakshmi
Nirmal, D.
Nesamani, I. Flavia Princess
Source
Advances in Condensed Matter Physics
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-02-16
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
Zirconium dioxide is a prospective high-κ material that can replace silicon dioxide.
Zirconium dioxide nanoparticle has been synthesized using sol-gel process at room temperature.
The structural and morphological characterization of the nanoscaled zirconium dioxide is done using FTIR, SEM, X-ray diffraction, and TEM.
The particle size of the synthesized ZrO2 is observed in the range of 50–80 nm with an average crystallite size of 2–10 nm.
The results are compared with commercial coarse zirconia which showed a particle size in the range of 900 nm–2.13 µm and crystallite size of 5.3 nm–20 nm.
It is expected that both nanoscaling and the high dielectric constant of ZrO2 would be useful in replacing the low-κ SiO2 dielectric with high-κ ZrO2 for CMOS fabrication technology.
The synthesized ZrO2 is subjected to impedance analysis and it exhibited a dielectric constant of 25 to find its application in short channel devices like multiple gate FinFETS and as a suitable alternative for the conventional gate oxide dielectric SiO2 with dielectric value of 3.9, which cannot survive the challenge of an end of oxide thickness ≤ 1 nm.
American Psychological Association (APA)
Nesamani, I. Flavia Princess& Prabha, V. Lakshmi& Paul, Aswathy& Nirmal, D.. 2014. Synthesis and Dielectric Studies of Monoclinic Nanosized Zirconia. Advances in Condensed Matter Physics،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-501423
Modern Language Association (MLA)
Nesamani, I. Flavia Princess…[et al.]. Synthesis and Dielectric Studies of Monoclinic Nanosized Zirconia. Advances in Condensed Matter Physics No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-501423
American Medical Association (AMA)
Nesamani, I. Flavia Princess& Prabha, V. Lakshmi& Paul, Aswathy& Nirmal, D.. Synthesis and Dielectric Studies of Monoclinic Nanosized Zirconia. Advances in Condensed Matter Physics. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-501423
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-501423