Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

Abstract EN

A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology.

By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and experimental results.

From this formula, we can easily find the superiority of adopting T-shape for the cantilevers.

The complete process of the cantilever sensor is then successfully developed.

The cantilever sensor is actuated by a layer of high-quality ZnO film with preferred (002) orientation, which is evaluated by SEM and XRD.

The key step of the process is protecting the ZnO film from KOH etching by a novel and effective method, which has rarely appeared in the literature.

Finally, this cantilever sensor is measured by a network analyzer, and it has a fundamental resonant frequency of 24.60 kHz.

The cantilever sensor developed in this study illustrates the feasibility and potential for many miniaturized sensor applications.