Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications
Joint Authors
Singh, Chandra Bhal
Bhattacharya, S.
Dhara, Sandip
Ahmed, Nafis
Bhargav, P. Balaji
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-4, 4 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-05-26
Country of Publication
Egypt
No. of Pages
4
Main Subjects
Abstract EN
Ammonia- (NH3-) free, hydrogenated amorphous silicon nitride (a-SiNx:H) thin films have been deposited using silane (SiH4) and nitrogen (N2) as source gases by plasma-enhanced chemical vapour deposition (PECVD).
During the experiment, SiH4 flow rate has been kept constant at 5 sccm, whereas N2 flow rate has been varied from 2000 to 1600 sccm.
The effect of nitrogen flow on SiNx:H films has been verified using Raman analysis studies.
Fourier transform Infrared spectroscopy analysis has been carried out to identify all the possible modes of vibrations such as Si–N, Si–H, and N–H present in the films, and the effect of nitrogen flow on these parameters is correlated.
The refractive index of the above-mentioned films has been calculated using UV-VIS spectroscopy measurements by Swanepoel’s method.
American Psychological Association (APA)
Ahmed, Nafis& Singh, Chandra Bhal& Bhattacharya, S.& Dhara, Sandip& Bhargav, P. Balaji. 2013. Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications. Conference Papers in Energy،Vol. 2013, no. 2013, pp.1-4.
https://search.emarefa.net/detail/BIM-502152
Modern Language Association (MLA)
Ahmed, Nafis…[et al.]. Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications. Conference Papers in Energy No. 2013 (2013), pp.1-4.
https://search.emarefa.net/detail/BIM-502152
American Medical Association (AMA)
Ahmed, Nafis& Singh, Chandra Bhal& Bhattacharya, S.& Dhara, Sandip& Bhargav, P. Balaji. Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications. Conference Papers in Energy. 2013. Vol. 2013, no. 2013, pp.1-4.
https://search.emarefa.net/detail/BIM-502152
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-502152
