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Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application
Joint Authors
Knight, K.
Gholipour, B.
Huang, C. C.
Ou, J. Y.
Hewak, D. W.
Source
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-04-23
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
Germanium antimony (Ge-Sb) thin films with tuneable compositions have been fabricated on SiO2/Si, borosilicate glass, and quartz glass substrates by chemical vapour deposition (CVD).
Deposition takes place at atmospheric pressure using metal chloride precursors at reaction temperatures between 750 and 875°C.
The compositions and structures of these thin films have been characterized by micro-Raman, scanning electron microscope (SEM) with energy dispersive X-ray analysis (EDX) and X-ray diffraction (XRD) techniques.
A prototype Ge-Sb thin film phase-change memory device has been fabricated and reversible threshold and phase-change switching demonstrated electrically, with a threshold voltage of 2.2–2.5 V.
These CVD-grown Ge-Sb films show promise for applications such as phase-change memory and optical, electronic, and plasmonic switching.
American Psychological Association (APA)
Huang, C. C.& Gholipour, B.& Knight, K.& Ou, J. Y.& Hewak, D. W.. 2012. Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application. Advances in OptoElectronics،Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-502379
Modern Language Association (MLA)
Huang, C. C.…[et al.]. Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application. Advances in OptoElectronics No. 2012 (2012), pp.1-7.
https://search.emarefa.net/detail/BIM-502379
American Medical Association (AMA)
Huang, C. C.& Gholipour, B.& Knight, K.& Ou, J. Y.& Hewak, D. W.. Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application. Advances in OptoElectronics. 2012. Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-502379
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-502379