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Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film
Author
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-05-09
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Materials Science , Minerals
Civil Engineering
Abstract EN
This paper reports on the study of direct current (DC) magnetron glow discharge plasma characteristics in a cylindrical magnetron system in argon-nitrogen.
Presence of nitrogen gas makes the plasma environment reactive, and it results in significant changes of the plasma properties—number density, electron temperature, floating potential, and sheath thickness.
Applied magnetic field is a parameter which is closely related to proper deposition of thin film.
Cylindrical Langmuir probe and Emissive probe are used as diagnostics for the estimation of various plasma parameters indicated earlier.
Controlled titanium nitride (TiN) thin film deposition on bell-metal at different argon-nitrogen gases ratio is another important study reported.
American Psychological Association (APA)
Borah, Sankar Moni. 2013. Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film. Journal of Materials،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-503453
Modern Language Association (MLA)
Borah, Sankar Moni. Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film. Journal of Materials No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-503453
American Medical Association (AMA)
Borah, Sankar Moni. Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film. Journal of Materials. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-503453
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-503453