The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators
Author
Source
Active and Passive Electronic Components
Issue
Vol. 2008, Issue 2008 (31 Dec. 2008), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-03-16
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators.
It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations.
Nonlinear equation difficulties are overcome by using the differential quadrature method.
The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated.
American Psychological Association (APA)
Hsu, Ming-Hung. 2009. The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators. Active and Passive Electronic Components،Vol. 2008, no. 2008, pp.1-9.
https://search.emarefa.net/detail/BIM-506931
Modern Language Association (MLA)
Hsu, Ming-Hung. The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators. Active and Passive Electronic Components No. 2008 (2008), pp.1-9.
https://search.emarefa.net/detail/BIM-506931
American Medical Association (AMA)
Hsu, Ming-Hung. The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators. Active and Passive Electronic Components. 2009. Vol. 2008, no. 2008, pp.1-9.
https://search.emarefa.net/detail/BIM-506931
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-506931
