Plasma and BIAS Modeling : Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC
Joint Authors
Geiser, Juergen
Blankenburg, Sven
Source
Modelling and Simulation in Engineering
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-13, 13 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-11-17
Country of Publication
Egypt
No. of Pages
13
Main Subjects
Abstract EN
We motivate our study by simulating the particle transport of a thin film deposition process done by PVD (physical vapor deposition) processes.
In this paper we present a new model taken into account a self-consistent electrostatic-particle in cell model with low density Argon plasma.
The collision model are based of Monte Carlo simulations is discussed for DC sputtering in lower pressure regimes.
In order to simulate transport phenomena within sputtering processes realistically, a spatial and temporal knowledge of the plasma density and electrostatic field configuration is needed.
Due to relatively low plasma densities, continuum fluid equations are not applicable.
We propose instead a Particle-in-cell (PIC) method, which allows the study of plasma behavior by computing the trajectories of finite-size particles under the action of an external and self-consistent electric field defined in a grid of points.
American Psychological Association (APA)
Geiser, Juergen& Blankenburg, Sven. 2011. Plasma and BIAS Modeling : Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC. Modelling and Simulation in Engineering،Vol. 2011, no. 2011, pp.1-13.
https://search.emarefa.net/detail/BIM-509163
Modern Language Association (MLA)
Geiser, Juergen& Blankenburg, Sven. Plasma and BIAS Modeling : Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC. Modelling and Simulation in Engineering No. 2011 (2011), pp.1-13.
https://search.emarefa.net/detail/BIM-509163
American Medical Association (AMA)
Geiser, Juergen& Blankenburg, Sven. Plasma and BIAS Modeling : Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC. Modelling and Simulation in Engineering. 2011. Vol. 2011, no. 2011, pp.1-13.
https://search.emarefa.net/detail/BIM-509163
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-509163