Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone
Joint Authors
Source
International Journal of Polymer Science
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-02-20
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
We investigated the removal of polymers with various chemical structures and the removal of ion-implanted resists using wet ozone.
The removal rates of polymers that have carbon-carbon (C–C) double bonds in the main chain were high.
The main chain of these polymers may be decomposed.
The removal rates of polymers that have C–C double bonds in the side chain were low.
The benzene ring in the side chain changes into carboxylic acid, so their ability to dissolve in water increased.
The polymers without C–C double bonds were not removed.
Removal of B and P ion-implanted resists became difficult with increasing acceleration energy of ions at implantation.
The resist with plastic-deformation hardness that was twice as hard as that of nonimplanted resist should be removed similarly to nonimplanted resist.
Using TOF-SIMS, we clarified that the molecule of cresol novolak resin was destroyed and carbonized by ion implantation.
American Psychological Association (APA)
Horibe, Hideo& Goto, Yousuke. 2012. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. International Journal of Polymer Science،Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-509712
Modern Language Association (MLA)
Horibe, Hideo& Goto, Yousuke. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. International Journal of Polymer Science No. 2012 (2012), pp.1-7.
https://search.emarefa.net/detail/BIM-509712
American Medical Association (AMA)
Horibe, Hideo& Goto, Yousuke. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. International Journal of Polymer Science. 2012. Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-509712
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-509712