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Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells
Joint Authors
Liu, Bangwu
Xia, Yang
Zhong, Sihua
Liu, Jinhu
Li, Chaobo
Source
International Journal of Photoenergy
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-08-22
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
The passivation process is of significant importance to produce high-efficiency black silicon solar cell due to its unique microstructure.
The black silicon has been produced by plasma immersion ion implantation (PIII) process.
And the Silicon nitride films were deposited by inline plasma-enhanced chemical vapor deposition (PECVD) to be used as the passivation layer for black silicon solar cell.
The microstructure and physical properties of silicon nitride films were characterized by scanning electron microscope (SEM), Fourier transform infrared spectroscopy (FTIR), spectroscopic ellipsometry, and the microwave photoconductance decay (μ-PCD) method.
With optimizing the PECVD parameters, the conversion efficiency of black silicon solar cell can reach as high as 16.25%.
American Psychological Association (APA)
Liu, Bangwu& Zhong, Sihua& Liu, Jinhu& Xia, Yang& Li, Chaobo. 2012. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. International Journal of Photoenergy،Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-512426
Modern Language Association (MLA)
Liu, Bangwu…[et al.]. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. International Journal of Photoenergy No. 2012 (2012), pp.1-5.
https://search.emarefa.net/detail/BIM-512426
American Medical Association (AMA)
Liu, Bangwu& Zhong, Sihua& Liu, Jinhu& Xia, Yang& Li, Chaobo. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. International Journal of Photoenergy. 2012. Vol. 2012, no. 2012, pp.1-5.
https://search.emarefa.net/detail/BIM-512426
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-512426