Diagnostics of dusty plasma properties in planar magnetron sputtering device

Abstract EN

The effect of Al dust particles on glow discharge regions, discharge voltage, discharge current, plasma potential, floating potential, electron density and electron temperature in planar magnetron sputtering device has been studied experimentally.

Four cylindrical Langmuir probes were employed to measure plasma parameters at different point on the radial axis of plasma column.

The results shows the present of Al dust causes to increase the discharge voltage and reduce the discharge current.

There are two electron groups in the present and absent of Al dust particles.

The radial profiles of plasma parameters in the present of dust are non- uniform.

The floating potential of probe becomes more negatively while the plasma potential becomes positive when the dust immersed into plasma region.

The electron density increases in the present of dust particle which lead to decreases the electron temperature.