The heterostructure ZnO Al SiO2 Si fabrication for piezoelectric SAW and BAW transducers and sensors
Joint Authors
Sarhan, R.
Larbi, F. Hadj
Lafane, S.
Messaci, S. Abdali
Boutkedjirt, T.
Source
Journal of New Technology and Materials
Issue
Vol. 7, Issue 1 (30 Jun. 2017), pp.47-52, 6 p.
Publisher
Larbi Ben M'hidi Oum el-Bouaghi University
Publication Date
2017-06-30
Country of Publication
Algeria
No. of Pages
6
Main Subjects
Information Technology and Computer Science
Abstract EN
Zinc oxide (ZnO) thin films were deposited by pulsed laser deposition technique for making ZnO/Al/SiO2/Si Bulk and Surface Acoustic Wave (BAW and SAW) transducers.
The aim is to improve the piezoelectric properties of the ZnO films, which are strongly linked to their texture and microstructure.
ZnO films with a wurtzite structure were deposited on the Al electrode layer, at different substrate temperatures, within the 100-500°C range.
The characterization by X-ray diffraction showed that the deposited Al electrode was (111) oriented and that the ZnO film has a c-axis (002) preferential orientation.
The scanning electron microscopy of the ZnO films on Al / SiO2 / Si substrate showed an evidence of compact grains with a honeycomb-like structure on surface and a columnar structure on cross-section appeared after a sequential transition of amorphous to non-oriented to crystalline phase.
The results indicated that the optimum substrate temperature is of 300°C and the electrical input impedance measurement on the Al / ZnO / Al BAW structure showed a piezoelectric response, where the fundamental resonance mode was located at 160 MHz, with an electromechanical coupling coefficient Keff2 equal to 3.2%.
The best piezoelectric response is obtained at the fourth (4th) thickness mode vibration, located at the frequency of 636.3 MHz and having Keff2 of 9.10 %.
American Psychological Association (APA)
Sarhan, R.& Larbi, F. Hadj& Lafane, S.& Messaci, S. Abdali& Boutkedjirt, T.. 2017. The heterostructure ZnO Al SiO2 Si fabrication for piezoelectric SAW and BAW transducers and sensors. Journal of New Technology and Materials،Vol. 7, no. 1, pp.47-52.
https://search.emarefa.net/detail/BIM-785559
Modern Language Association (MLA)
Sarhan, R.…[et al.]. The heterostructure ZnO Al SiO2 Si fabrication for piezoelectric SAW and BAW transducers and sensors. Journal of New Technology and Materials Vol. 7, no. 1 (2017), pp.47-52.
https://search.emarefa.net/detail/BIM-785559
American Medical Association (AMA)
Sarhan, R.& Larbi, F. Hadj& Lafane, S.& Messaci, S. Abdali& Boutkedjirt, T.. The heterostructure ZnO Al SiO2 Si fabrication for piezoelectric SAW and BAW transducers and sensors. Journal of New Technology and Materials. 2017. Vol. 7, no. 1, pp.47-52.
https://search.emarefa.net/detail/BIM-785559
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 51-52
Record ID
BIM-785559