Electrical glow discharges and plasma parameter of planar sputtering system for silver target
Other Title(s)
دراسة معلمات التفريغ الكهربائي لمنظومة الترذيذ المستمر لهدف مسطح من الفضة
Author
Source
Issue
Vol. 16, Issue 37 (31 Aug. 2018), pp.65-72, 8 p.
Publisher
University of Baghdad College of Science
Publication Date
2018-08-31
Country of Publication
Iraq
No. of Pages
8
Main Subjects
Abstract EN
DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar.
The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters.
The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve.
The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region.
Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space.
Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.
American Psychological Association (APA)
Hasan, Mazin Hamid. 2018. Electrical glow discharges and plasma parameter of planar sputtering system for silver target. Iraqi Journal of Physics،Vol. 16, no. 37, pp.65-72.
https://search.emarefa.net/detail/BIM-843330
Modern Language Association (MLA)
Hasan, Mazin Hamid. Electrical glow discharges and plasma parameter of planar sputtering system for silver target. Iraqi Journal of Physics Vol. 16, no. 37 (Aug. 2018), pp.65-72.
https://search.emarefa.net/detail/BIM-843330
American Medical Association (AMA)
Hasan, Mazin Hamid. Electrical glow discharges and plasma parameter of planar sputtering system for silver target. Iraqi Journal of Physics. 2018. Vol. 16, no. 37, pp.65-72.
https://search.emarefa.net/detail/BIM-843330
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 71-72
Record ID
BIM-843330