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Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering
Joint Authors
Source
Issue
Vol. 2008, Issue 2008 (31 Dec. 2008), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2008-01-28
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
Nitrogen-rich titanium nitride (TiN) thin films containing excess nitrogen up to 87.0 at.% were produced on (100) Si substrates via the reactive magnetron DC-sputtering of a commercially available 99.995 at.% pure Ti target within an argon-nitrogen (Ar-N2) atmosphere with a 20-to-1 gas ratio.
The process pressure (PP) and substrate temperature (TS) at which deposition occurred were varied systematically between 0.26 Pa–1.60 Pa and between 15.0∘C–600∘C, respectively, and their effects on the chemical composition, surface morphology, and preferred orientation were characterized by energy dispersive X-ray spectroscopy (EDS), field emission scanning electron microscopy (FE-SEM), and X-ray diffraction (XRD).
The EDS analysis confirms increasing nitrogen content with increasing PP and TS.
The SEM images reveal a uniform and crystallized surface morphology as well as a closely packed cross-sectional morphology for all crystalline films and a loosely packed cross-sectional morphology for amorphous films.
Films produced at lower PP and TS have a pyramidal surface morphology which transitions to a columnar and stratified structure as PP and TS increase.
The XRD analysis confirms the existence of only the δ-TiN phase and the absence of other nitrides, oxides, and/or sillicides in all cases.
It also indicates that at lower PP and TS, the preferred orientation relative to the substrate is along the (111) planes, and that it transitions to a random orientation along the (200), (220), and (311) planes as PP and TS increase and these results correlate with and qualify those observed by SEM.
American Psychological Association (APA)
Penilla, E.& Wang, Junlan. 2008. Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering. Journal of Nanomaterials،Vol. 2008, no. 2008, pp.1-9.
https://search.emarefa.net/detail/BIM-988090
Modern Language Association (MLA)
Penilla, E.& Wang, Junlan. Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering. Journal of Nanomaterials No. 2008 (2008), pp.1-9.
https://search.emarefa.net/detail/BIM-988090
American Medical Association (AMA)
Penilla, E.& Wang, Junlan. Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering. Journal of Nanomaterials. 2008. Vol. 2008, no. 2008, pp.1-9.
https://search.emarefa.net/detail/BIM-988090
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-988090